Principles of X-ray Photoelectron Spectroscopy

목차

1. What is X-ray Photoelectron Spectroscopy
2. X-ray Photoelectron Spectroscopy
3. Spectral Interpretation

본문내용

1. Introduction
What is Surface?
The top 2∼10 atomic layers : 0.5∼3 nm
Film thickness of devices : 10 ∼ 100 nm

How many atoms in a surface?
# of atoms in 1 ㎠ surface : 1015
# of atoms in 1 ㎤ cube : 1023
# of atoms in surface for bulk, s/b ≈ 10-8 x 100 ≈ 10-6 %
→ # of atoms for 1 ㎟ Probe : 1013 개 In the top 10 layers : 1014 ea or 10-10 mol
→ To detect 10-3 ∼ 10-6 ppm level(107∼1010 atoms) of additive or contaminant : needs a high spatial resolution !

Why UHV? → 3 x 10-9 torr
◎. Long Mean Free Paths of Photon or Electron
◎. Exclude an adsorption at Surface

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