into the crystal lattice g) desorption h) gas phase diffusion Ks Atomic Layer Deposition [as aspect ratio ... Wafer, IN-Wafer to other position lot(25장 기준) Loading effect : 1)pattern density 차이 2)pattern pitch ... 잔여 DIW 후 공정에서 insulator 역할) Contamination에 의해 Gate oxide failure 발생 가능성(두께 일정하지 않음) Gate Oxide : as thickness