Kinetic Spray 공정으로 제조된 Nb 코팅 소재의 미세조직 및 물성에 미치는 열간 등압 성형(HIP)의 영향

서지정보

ㆍ발행기관 : 한국분말야금학회 ㆍ수록지정보 : 한국분말야금학회지 / 23권 / 1호
ㆍ저자명 : 이지혜, 양상선, 이기안

영어 초록

Niobium is one of the most important and rarest metals, and is used in the electronic and energy industries. However, it’s extremely high melting point and oxygen affinity limits the manufacture of Nb coating materials. Here, a Nb coating material is manufactured using a kinetic spray process followed by hot isotactic pressing to improve its properties. OM (optical microscope), XRD (X-ray diffraction), SEM (scanning electron microscopy), and Vickers hardness and EPMA (electron probe micro analyzer) tests are employed to investigate the macroscopic properties of the manufactured Nb materials. The powder used to manufacture the material has angular-shaped particles with an average particle size of 23.8 μm. The porosity and hardness of the manufactured Nb material are 0.18% and 221 Hv, respectively. Additional HIP is applied to the manufactured Nb material for 4 h under an Ar atmosphere after which the porosity decreases to 0.08% and the hardness increases to 253 Hv. Phase analysis after the HIP shows the presence of only pure Nb. The study also discusses the possibility of using the manufactured Nb material as a sputtering target.

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