박막증착

목차

1. Experimental purposes, Experiment-related equipment
2. Experiment-related materials
3. Experimental related theory
4. Experimental methods
5. Experimental results
6. Conclusions
7. Note and Amendments, References

본문내용

1. Experimental purposes

You can experience the principle of thin films deposition. You can also understand how to make a shadow mask. This experiment helps you how can depose the thin films with Ag or Al. It is second way from cutting and cleaning of the silicon wafer to finally RLC circuit. The overall experimental procedure is that series of experience. First, you can cut and clean silicon-wayfer. Second, it has been deposed by the deposed material. Third step is mesuring the transport(Hall mesurement). Forth step is transport's changes with temperature. Fifth step is mesuring devices-mesure the Diode, Tr Iv. The final step, RLC circuit, you can understand that the experiment's purpose is something that overall. So we want to run the second step, thin films deposition. you will understand not only principle of deposition but also the type of vacuum pump, study of vacuum system, understanding the structure for a vacuum chamber. So this will be very helpful to you. The piece of experimental device is thermal evaporator and optical microscope. Experimental materials are silicon wayfer, Al pellets, Ag pellets, aluminum Foil, razor blades.

참고 자료

Principles of Electronic Materials and Devices, S.O. Kasap, Mcgraw-Hill
Semiconductor Device Fundamentals, Rober. F. Pierret, Addison-Wesley
Solid State Electronic Devices, Ben G. Streetman, Prentice-Hall
Semiconductor Physics and Devices, Donald A. Neamen, Mcgraw-Hill
Optoelectronics and Photonics, S.O. Kasap, Prentice Hall